The special gas system refers to SiH4, NF3, Cl2, which are flammable and explosive gases, toxic gases, corrosive gases, and some gases with extremely high purity (over 99.999%). These are highly hazardous and require equipment, pipelines and components for the storage, transportation and distribution of special gases to ensure safety. The special gas system engineering is an engineering used to achieve the safe use of the special gas system. Gaispack provides overall solutions including design, selection, manufacturing, installation, testing, commissioning and system hosting services. 
The special gas pipeline system consists of four types of equipment: storage, transportation, distribution, and control. "Storage" refers to the gas source part (the special gas cabinet GC), "transportation" refers to the piping part (usually using double tubes), "distribution" refers to the secondary distribution part (the gas distribution cabinet VMB), and "control" refers to the supervision and control part (the gas management system GMS). 
Gas alarm system, a monitoring control system for detecting leaks of inert, flammable and toxic gases. 
The combustible/toxic gas detector is responsible for detecting various gases in the production site and converting the collected gas concentrations into analog signals. The data acquisition module transmits the collected signals in a serial communication manner to the GDS control unit. The GDS control unit compares the detected values with their respective alarm upper/lower limits. When the concentration detected by a certain detector exceeds the upper limit or falls below the lower limit, the GDS control unit outputs an alarm signal through the DO module, triggering the sound and light alarm and turning on or off the related equipment. 
Operators can monitor the conditions at all detection points within the factory area through human-machine interaction interfaces such as the touch screen of the industrial control computer, operator stations, and engineer stations. The main information includes gas concentration values, alarm upper limits, real-time curves, and historical data. In case of an alarm, they can also mute the alarm and respond to it through the industrial control computer.